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1.. . & " ? # C& #!# # > & % > A: ? # & % . .: % &*" « "$», 1982.
2.- D. ., * % & . ., Y . . D#& C& # : ? # & % . .: % &*" #/ 8 , 2007.
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1. Gabriel M. Rebeiz. RF MEMS: Theory, Design, and Technology. Hardcover, 2003.
214
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1. Rebeiz G.M. RF MEMS. Theory, Design and Technology. N. Y.: Wiley — Interscience, 2003.
217
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2.+ '. . 8 # " 8 # C& 8 # " # "#- " 8 C& # " # $$. .: % &*" #/ 8 , 2007.
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