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Зонная плавка 3.vi G:\ТМиЭТ\Зонная плавка 3.vi Last modified on 13.04.2018 at 15:23
Printed on 09.12.2018 at 17:06
Выращивание кристаллов методом зонной плавки |
Примесь 1 |
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Исходные данные: |
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Примесь 2 |
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Примесь 3 |
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Тип расчета |
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1,00E+17 |
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Материал |
1 |
Первая примесь |
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2 |
Первая примесь летучая, вторая нелетучая |
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Ge |
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3 |
Три графика для трех примесей |
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4 |
Первая примесь после одного прохода, вторая после многих |
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Примесь 1 |
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Примесь 2 |
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Примесь 3 |
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Al |
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Bi |
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Zn |
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Условия выращивания: |
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1,00E+16 |
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Скорость |
f (мм/мин) (см/c) |
f (мм/мин) (см/c) |
f (мм/мин) (см/c) |
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кристаллизации |
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0,50 |
0,0008 |
0,50 |
0,0008 |
0,50 |
0,0008 |
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Длина расплавленной |
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L0 (см) |
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L0 (см) |
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L0 (см) |
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зоны |
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3,00 |
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3,00 |
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3,00 |
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Диаметр кристалла |
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DКР (мм) |
(см) |
DКР (мм) |
(см) |
DКР (мм) |
(см) |
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50,00 |
5,00 |
50,00 |
5,00 |
50,00 |
5,00 |
1,00E+15 |
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Длина слитка |
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L (см) |
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L (см) |
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L (см) |
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60,00 |
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60,00 |
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60,00 |
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Начальная |
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C0 (см-3) |
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C0 (см-3) |
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C0 (см-3) |
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концентрация примеси |
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5,00E+16 |
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5,00E+16 |
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5,00E+16 |
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Концентрация примеси |
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CП (см-3) |
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CП (см-3) |
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CП (см-3) |
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в подпитывающем слое |
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5,00E+16 |
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5,00E+16 |
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5,00E+16 |
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1,00E+14 |
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Справочные и рассчитанные параметры технолог. процесса: |
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Равновесный коэффициент |
k0 |
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k0 |
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k0 |
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распределения |
7,30E-2 |
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4,00E-5 |
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4,00E-4 |
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Линейный коэффициент |
a |
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a |
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a |
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0,00E+0 |
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0,00E+0 |
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0,00E+0 |
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испарения |
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1,00E+13 |
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Коэффициент диффузии |
D |
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D |
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D |
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1,00E-4 |
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1,00E-4 |
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1,00E-4 |
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Эффективный коэффициент |
k |
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k |
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k |
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распределения |
1,53E-1 |
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9,20E-5 |
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9,20E-4 |
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Приведенный |
kИ |
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kИ |
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kИ |
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коэффициент испарения |
0,00E+0 |
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0,00E+0 |
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0,00E+0 |
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1,00E+12 |
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kОБ |
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kОБ |
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kОБ |
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Обобщенный коэффициент |
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0,0 |
2,5 |
5,0 |
7,5 |
10,0 |
12,5 |
15,0 |
17,5 |
20,0 |
22,5 |
25,0 |
27,5 |
30,0 |
32,5 |
35,0 |
37,5 |
40,0 |
42,5 |
45,0 |
47,5 |
50,0 |
52,5 |
55,0 |
57,5 |
60,0 |
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распределения |
1,53E-1 |
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9,20E-5 |
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9,20E-4 |
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x, см |
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k*C0 |
k*C0 |
k*C0 |
7,67E+15 |
4,60E+12 |
4,60E+13 |
x, см |
C_T1(x) |
C_T2(x) |
C_T3(x) |
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0,00 |
7,67E+15 |
4,60E+12 |
45,99E+12 |
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0,05 |
7,78E+15 |
4,68E+12 |
46,76E+12 |
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0,10 |
7,89E+15 |
4,75E+12 |
47,53E+12 |
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0,15 |
7,99E+15 |
4,83E+12 |
48,29E+12 |
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0,20 |
8,10E+15 |
4,91E+12 |
49,06E+12 |
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0,25 |
8,21E+15 |
4,98E+12 |
49,82E+12 |
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0,30 |
8,31E+15 |
5,06E+12 |
50,59E+12 |
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0,35 |
8,42E+15 |
5,14E+12 |
51,35E+12 |
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0,40 |
8,53E+15 |
5,22E+12 |
52,12E+12 |
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0,45 |
8,63E+15 |
5,29E+12 |
52,89E+12 |
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0,50 |
8,74E+15 |
5,37E+12 |
53,65E+12 |
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0,55 |
8,84E+15 |
5,45E+12 |
54,42E+12 |
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0,60 |
8,95E+15 |
5,52E+12 |
55,18E+12 |
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0,65 |
9,05E+15 |
5,60E+12 |
55,95E+12 |
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0,70 |
9,16E+15 |
5,68E+12 |
56,71E+12 |
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0,75 |
9,26E+15 |
5,75E+12 |
57,48E+12 |
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0,80 |
9,37E+15 |
5,83E+12 |
58,25E+12 |
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0,85 |
9,47E+15 |
5,91E+12 |
59,01E+12 |
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0,90 |
9,57E+15 |
5,98E+12 |
59,78E+12 |
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0,95 |
9,68E+15 |
6,06E+12 |
60,54E+12 |
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1,00 |
9,78E+15 |
6,14E+12 |
61,31E+12 |
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1,05 |
9,88E+15 |
6,21E+12 |
62,07E+12 |
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1,10 |
9,99E+15 |
6,29E+12 |
62,84E+12 |
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1,15 |
10,09E+15 |
6,37E+12 |
63,61E+12 |
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1,20 |
10,19E+15 |
6,44E+12 |
64,37E+12 |
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1,25 |
10,29E+15 |
6,52E+12 |
65,14E+12 |
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1,30 |
10,39E+15 |
6,60E+12 |
65,90E+12 |
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1,35 |
10,49E+15 |
6,67E+12 |
66,67E+12 |
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1,40 |
10,59E+15 |
6,75E+12 |
67,43E+12 |
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1,45 |
10,69E+15 |
6,83E+12 |
68,20E+12 |
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1,50 |
10,80E+15 |
6,90E+12 |
68,96E+12 |
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1,55 |
10,90E+15 |
6,98E+12 |
69,73E+12 |
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1,60 |
11,00E+15 |
7,06E+12 |
70,50E+12 |
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1,65 |
11,09E+15 |
7,13E+12 |
71,26E+12 |
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1,70 |
11,19E+15 |
7,21E+12 |
72,03E+12 |
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1,75 |
11,29E+15 |
7,29E+12 |
72,79E+12 |
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1,80 |
11,39E+15 |
7,36E+12 |
73,56E+12 |
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1,85 |
11,49E+15 |
7,44E+12 |
74,32E+12 |
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1,90 |
11,59E+15 |
7,52E+12 |
75,09E+12 |
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1,95 |
11,69E+15 |
7,59E+12 |
75,85E+12 |
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2,00 |
11,78E+15 |
7,67E+12 |
76,62E+12 |
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2,05 |
11,88E+15 |
7,75E+12 |
77,38E+12 |
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2,10 |
11,98E+15 |
7,82E+12 |
78,15E+12 |
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2,15 |
12,08E+15 |
7,90E+12 |
78,92E+12 |
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2,20 |
12,17E+15 |
7,98E+12 |
79,68E+12 |
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